EUV and VUV cameras provide high resolution (typically down to less than 10 microns), high dynamic range (12 to 16 bit) as well as good temporal resolution (down to microsecond range) that are necessary for modern pulsed plasma discharge EUV sources.

The camera can acquire single shot or synchronized multiple shot images at up to 13fps at full resolution from a native EUV source without suffering from bleeding artifacts.
Flanged and/or in vacuum versions are available depending on the flexibility required for either mask blank / resist / source / optic characterization and inspection.

Sensitivity response can be extended from 13.5nm up to 0,0135nm should the camera be used to sense multiple characteristic lines. Deep cooling allows very low dark current down to less than 0.005 electron/pixel/sec for extended exposure should very faint signal requires long integration periods.